Inventor
WITKOWICKI DEREK JOHN
US11 patents
Patents
11 patentsUS9881820B2Jan 30, 2018
Front opening ring pod
LAM RES CORP124 citations97
US10124492B2Nov 13, 2018
Automated replacement of consumable parts using end effectors interfacing with plasma processing system
LAM RES CORP25 citations93
US10062590B2Aug 28, 2018
Front opening ring pod
LAM RES CORP23 citations93
US10062589B2Aug 28, 2018
Front opening ring pod
LAM RES CORP20 citations93
US10062599B2Aug 28, 2018
Automated replacement of consumable parts using interfacing chambers
LAM RES CORP30 citations93
US10427307B2Oct 1, 2019
Automated replacement of consumable parts using end effectors interfacing with plasma processing system
LAM RES CORP3 citations72
US10304717B2May 28, 2019
Automated replacement of consumable parts using interfacing chambers
LAM RES CORP2 citations72
US10297480B2May 21, 2019
Buffer station with single exit-flow direction
LAM RES CORP4 citations68
US9881826B2Jan 30, 2018
Buffer station with single exit-flow direction
LAM RES CORP4 citations68
US10770339B2Sep 8, 2020
Automated replacement of consumable parts using interfacing chambers
LAM RES CORP0 citations51
US10190865B2Jan 29, 2019
Verifying end effector flatness using electrical continuity
LAM RES CORP0 citations47