Inventor
KRISTOFFERSEN CANDI
US5 patents
Patents
5 patentsUS9698036B2Jul 4, 2017
Stacked wafer cassette loading system
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US9818633B2Nov 14, 2017
Equipment front end module for transferring wafers and method of transferring wafers
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US10559483B2Feb 11, 2020
Platform architecture to improve system productivity
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US12272583B2Apr 8, 2025
Reduced footprint wafer handling platform
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US7164282B1Jan 16, 2007
Methods and apparatus for determining an average electrical response to a conductive layer on a substrate
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