Inventor
GOYANI TEJAL
US3 patents
Patents
3 patentsUS8043907B2Oct 25, 2011
Atomic layer deposition processes for non-volatile memory devices
APPLIED MATERIALS INC42 citations92
US7659158B2Feb 9, 2010
Atomic layer deposition processes for non-volatile memory devices
APPLIED MATERIALS INC25 citations92
US7910497B2Mar 22, 2011
Method of forming dielectric layers on a substrate and apparatus therefor
APPLIED MATERIALS INC27 citations91