Inventor

CORDTS III BERNHARDT F

US2 patents

Patents

2 patents

US6417078B1Jul 9, 2002

Implantation process using sub-stoichiometric, oxygen doses at different energies

IBIS TECHNOLOGY CORP101 citations94

US6794264B2Sep 21, 2004

Implantation process using substoichiometric, oxygen doses at different energies

IBIS TECHNOLOGY CORP18 citations89