Inventor

DROR CHEN

IL4 patents

⚠️ This page may combine multiple inventors who share the name “DROR CHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

2 patents

US10387608B2Aug 20, 2019

Metrology target identification, design and verification

KLA TENCOR CORP6 citations81

US9910953B2Mar 6, 2018

Metrology target identification, design and verification

KLA TENCOR CORP7 citations81

KLA CORP

2 patents

US11353799B1Jun 7, 2022

System and method for error reduction for metrology measurements

KLA CORP5 citations68

US11978679B2May 7, 2024

Substrate with cut semiconductor pieces having measurement test structures for semiconductor metrology

KLA CORP0 citations57