Inventor
HWANG CHUL JOO
KR39 patents
⚠️ This page may combine multiple inventors who share the name “HWANG CHUL JOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JUSUNG ENG CO LTD
38 patentsUS10808315B2Oct 20, 2020
Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor
JUSUNG ENG CO LTD5 citations80
US7771538B2Aug 10, 2010
Substrate supporting means having wire and apparatus using the same
JUSUNG ENG CO LTD6 citations73
US9748077B2Aug 29, 2017
Substrate processing device and substrate processing method
JUSUNG ENG CO LTD3 citations70
US12543424B2Feb 3, 2026
Solar cell and manufacturing method therefor
JUSUNG ENG CO LTD0 citations62
US12334329B2Jun 17, 2025
Substrate processing method
JUSUNG ENG CO LTD0 citations62
US12106941B2Oct 1, 2024
Substrate processing device and substrate processing method
JUSUNG ENG CO LTD0 citations62
US11837445B2Dec 5, 2023
Substrate processing device and substrate processing method
JUSUNG ENG CO LTD0 citations62
US7942623B2May 17, 2011
Substrate supporting means having wire and apparatus using the same
JUSUNG ENG CO LTD4 citations62
US12198901B2Jan 14, 2025
Method for cleaning chamber of substrate processing apparatus
JUSUNG ENG CO LTD0 citations61
US10504701B2Dec 10, 2019
Substrate processing device and substrate processing method
JUSUNG ENG CO LTD1 citations60
US10202690B2Feb 12, 2019
Substrate treating apparatus and method
JUSUNG ENG CO LTD1 citations60
US11970770B2Apr 30, 2024
Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor
JUSUNG ENG CO LTD0 citations59
US11371142B2Jun 28, 2022
Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor
JUSUNG ENG CO LTD0 citations59
US12381067B2Aug 5, 2025
Substrate processing apparatus
JUSUNG ENG CO LTD0 citations58
US11417562B2Aug 16, 2022
Substrate supporting apparatus
JUSUNG ENG CO LTD0 citations57
US12518972B2Jan 6, 2026
Method for forming thin film
JUSUNG ENG CO LTD0 citations56
US12024774B2Jul 2, 2024
Apparatus for supplying gas and apparatus for processing substrate using the same
JUSUNG ENG CO LTD1 citations56
US12446351B2Oct 14, 2025
Substrate for solar cell, solar cell, and solar cell manufacturing method
JUSUNG ENG CO LTD0 citations55
US12255262B2Mar 18, 2025
Method for manufacturing solar cell
JUSUNG ENG CO LTD0 citations55
US12522924B2Jan 13, 2026
Substrate processing device
JUSUNG ENG CO LTD0 citations53
US12417898B2Sep 16, 2025
Substrate processing apparatus
JUSUNG ENG CO LTD0 citations53
US12477944B2Nov 18, 2025
Solar cell and method for manufacturing same
JUSUNG ENG CO LTD0 citations52
US11469135B2Oct 11, 2022
Substrate placing part that is arranged in substrate processing apparatus
JUSUNG ENG CO LTD0 citations51
US12548736B2Feb 10, 2026
Substrate processing device, method for preparing substrate processing device, and substrate processing method
JUSUNG ENG CO LTD0 citations50
US12543520B2Feb 3, 2026
Method for forming electrode
JUSUNG ENG CO LTD0 citations50
US11651941B2May 16, 2023
Apparatus for distributing gas, and apparatus and method for processing substrate
JUSUNG ENG CO LTD0 citations49
US12032013B2Jul 9, 2024
Substrate inspection device and substrate inspection method
JUSUNG ENG CO LTD0 citations48
US11726134B2Aug 15, 2023
Substrate inspection device and substrate inspection method
JUSUNG ENG CO LTD0 citations48
US12533706B2Jan 27, 2026
Gas supplying method using gas distributing unit
JUSUNG ENG CO LTD0 citations47
US12188126B2Jan 7, 2025
Substrate processing apparatus
JUSUNG ENG CO LTD0 citations47
US12142515B2Nov 12, 2024
Substrate processing apparatus
JUSUNG ENG CO LTD0 citations47
US12170221B2Dec 17, 2024
Apparatus for processing substrate
JUSUNG ENG CO LTD0 citations46
US12571483B2Mar 10, 2026
Block valve for substrate processing device, and substrate processing device
JUSUNG ENG CO LTD0 citations45
US12538745B2Jan 27, 2026
Substrate transfer method and substrate transfer device
JUSUNG ENG CO LTD0 citations44
US12436547B2Oct 7, 2025
Gas supply apparatus for substrate processing apparatus
JUSUNG ENG CO LTD0 citations44
US12534802B2Jan 27, 2026
Substrate processing method
JUSUNG ENG CO LTD0 citations43
US12371786B2Jul 29, 2025
Substrate processing method
JUSUNG ENG CO LTD0 citations43
US10373821B2Aug 6, 2019
Substrate processing method
JUSUNG ENG CO LTD0 citations39