Inventor
SEO SEUNG HOON
KR4 patents
Patents
4 patentsUS9748077B2Aug 29, 2017
Substrate processing device and substrate processing method
JUSUNG ENG CO LTD3 citations70
US10504701B2Dec 10, 2019
Substrate processing device and substrate processing method
JUSUNG ENG CO LTD1 citations60
US10202690B2Feb 12, 2019
Substrate treating apparatus and method
JUSUNG ENG CO LTD1 citations60
US11028481B2Jun 8, 2021
Substrate treating apparatus and method
JUSUNG ENG CO LTD0 citations55