Inventor

MCINTYRE JR EDWARD K

US3 patents

Patents

3 patents

US5497006AMar 5, 1996

Ion generating source for use in an ion implanter

EATON CORP167 citations97

US5218210AJun 8, 1993

Broad beam flux density control

EATON CORP21 citations87

US5023458AJun 11, 1991

Ion beam control system

EATON CORP11 citations71