Inventor
ROMANOVSKY ANATOLY
US27 patents
⚠️ This page may combine multiple inventors who share the name “ROMANOVSKY ANATOLY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
10 patentsUS9891177B2Feb 13, 2018
TDI sensor in a darkfield system
KLA TENCOR CORP56 citations96
US7773212B1Aug 10, 2010
Contemporaneous surface and edge inspection
KLA TENCOR CORP24 citations92
US10488348B2Nov 26, 2019
Wafer inspection
KLA TENCOR CORP3 citations72
US9841512B2Dec 12, 2017
System and method for reducing radiation-induced false counts in an inspection system
KLA TENCOR CORP2 citations70
US9915622B2Mar 13, 2018
Wafer inspection
KLA TENCOR CORP0 citations51
US10241217B2Mar 26, 2019
System and method for reducing radiation-induced false counts in an inspection system
KLA TENCOR CORP0 citations49
US8934091B2Jan 13, 2015
Monitoring incident beam position in a wafer inspection system
KLA TENCOR CORP0 citations48
US9678350B2Jun 13, 2017
Laser with integrated multi line or scanning beam capability
KLA TENCOR CORP0 citations40
US9587936B2Mar 7, 2017
Scanning inspection system with angular correction
KLA TENCOR CORP0 citations39
US9810619B2Nov 7, 2017
Method and system for simultaneous tilt and height control of a substrate surface in an inspection system
KLA TENCOR CORP0 citations35
KLA TENCOR TECH CORP
6 patentsUS7436508B2Oct 14, 2008
Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection system
KLA TENCOR TECH CORP16 citations92
US7671982B2Mar 2, 2010
Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection system
KLA TENCOR TECH CORP6 citations73
US7414715B2Aug 19, 2008
Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation
KLA TENCOR TECH CORP8 citations72
US7777875B2Aug 17, 2010
Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation
KLA TENCOR TECH CORP4 citations61
US7423250B2Sep 9, 2008
Systems, circuits and methods for extending the detection range of an inspection system by avoiding circuit saturation
KLA TENCOR TECH CORP1 citations50
US7746462B2Jun 29, 2010
Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear range
KLA TENCOR TECH CORP0 citations49
KLA CORP
4 patentsUS12345658B2Jul 1, 2025
Large-particle monitoring with laser power control for defect inspection
KLA CORP0 citations57
US12578285B2Mar 17, 2026
Gas flow configurations for semiconductor inspections
KLA CORP0 citations54
US11374375B2Jun 28, 2022
Laser closed power loop with an acousto-optic modulator for power modulation
KLA CORP0 citations52
US11733172B2Aug 22, 2023
Apparatus and method for rotating an optical objective
KLA CORP0 citations51
ROMANOVSKY ANATOLY
2 patentsWOLTERS CHRISTIAN
2 patentsUS10215712B2Feb 26, 2019
Method and apparatus for producing and measuring dynamically focused, steered, and shaped oblique laser illumination for spinning wafer inspection system
WOLTERS CHRISTIAN3 citations71
US8134698B1Mar 13, 2012
Dynamic range extension in surface inspection systems
WOLTERS CHRISTIAN6 citations71