Inventor

Tatarkhanov Mous

US2 patents

Patents

2 patents

US9841512B2Dec 12, 2017

System and method for reducing radiation-induced false counts in an inspection system

KLA TENCOR CORP2 citations70

US10241217B2Mar 26, 2019

System and method for reducing radiation-induced false counts in an inspection system

KLA TENCOR CORP0 citations49