Inventor

VAN HANEHEM MATTHEW RICHARD

US2 patents

⚠️ This page may combine multiple inventors who share the name “VAN HANEHEM MATTHEW RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ROHM & HAAS ELECT MAT

1 patent

US9102034B2Aug 11, 2015

Method of chemical mechanical polishing a substrate

ROHM & HAAS ELECT MAT8 citations81

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC

1 patent

US11292938B2Apr 5, 2022

Method of selective chemical mechanical polishing cobalt, zirconium oxide, poly-silicon and silicon dioxide films

ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations43