P

Inventor

FUKUHARA TOSHIAKI

JP38 patents
⚠️ This page may combine multiple inventors who share the name “FUKUHARA TOSHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJIFILM CORP

12 patents
US7504194B2Mar 17, 2009

Positive resist composition and pattern making method using the same

FUJIFILM CORP16 citations92
US8034537B2Oct 11, 2011

Positive resist composition and pattern forming method

FUJIFILM CORP12 citations84
US7790351B2Sep 7, 2010

Positive resist composition and pattern making method using the same

FUJIFILM CORP11 citations84
US7635554B2Dec 22, 2009

Positive resist composition and pattern forming method

FUJIFILM CORP13 citations84
US9523912B2Dec 20, 2016

Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device, electronic device and compound

FUJIFILM CORP7 citations83
US9250519B2Feb 2, 2016

Pattern forming method and actinic ray-sensitive or radiation-sensitive resin composition for use in the method

FUJIFILM CORP8 citations83
US8343708B2Jan 1, 2013

Positive resist composition and pattern forming method

FUJIFILM CORP2 citations63
US7666574B2Feb 23, 2010

Positive resist composition and pattern forming method

FUJIFILM CORP5 citations63
US12346026B2Jul 1, 2025

Composition for forming underlayer film, resist pattern forming method, and manufacturing method of electronic device

FUJIFILM CORP0 citations62
US9405197B2Aug 2, 2016

Pattern forming method, method for manufacturing electronic device, and electronic device

FUJIFILM CORP2 citations62
US10545405B2Jan 28, 2020

Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, mask blank including actinic ray-sensitive or radiation-sensitive film, pattern forming method, and method for manufacturing electronic device

FUJIFILM CORP0 citations41
US9454079B2Sep 27, 2016

Actinic ray- or radiation-sensitive resin composition, actinic ray- or radiation-sensitive film and method of forming pattern

FUJIFILM CORP0 citations40

YAZAKI CORP

12 patents

FUKUHARA TOSHIAKI

5 patents

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

5 patents

FURUMURA TAKASHI

2 patents

HITACHI LTD

1 patent

PANASONIC CORP

1 patent