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Inventor
OJIMA TOMOKO
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “OJIMA TOMOKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OJIMA TOMOKO
1 patent
US8476170B2
Jul 2, 2013
Method of forming pattern, method of manufacturing semiconductor device, and method of manufacturing template
OJIMA TOMOKO
6 citations
60
TAKEKAWA YOKO
1 patent
US8871408B2
Oct 28, 2014
Mask pattern creation method, recording medium, and semiconductor device manufacturing method
TAKEKAWA YOKO
3 citations
53
TOSHIBA MEMORY CORP
1 patent
US10153174B2
Dec 11, 2018
Method of manufacturing semiconductor device
TOSHIBA MEMORY CORP
0 citations
33