Inventor

SPARKS EILEEN

US2 patents

⚠️ This page may combine multiple inventors who share the name “SPARKS EILEEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ENTEGRIS INC

1 patent

US9691629B2Jun 27, 2017

Compositions and methods for the selective removal of silicon nitride

ENTEGRIS INC3 citations70

ADVANCED TECH MATERIALS

1 patent

US9158203B2Oct 13, 2015

Compositions and methods for the selective removal of silicon nitride

ADVANCED TECH MATERIALS2 citations59