Inventor

TERASHIMA RYUSEI

JP2 patents

Patents

2 patents

US11940391B2Mar 26, 2024

Defect inspection apparatus, method for inspecting defect, and method for manufacturing photomask blank

SHINETSU CHEMICAL CO0 citations53

US12372863B2Jul 29, 2025

Photomask blank, method for producing photomask, and photomask

SHINETSU CHEMICAL CO0 citations41