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Inventor
ARAUJO JEFF G
US
3 patents
⚠️ This page may combine multiple inventors who share the name “ARAUJO JEFF G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
2 patents
US7607879B2
Oct 27, 2009
Substrate processing apparatus with removable component module
BROOKS AUTOMATION INC
36 citations
91
US7762755B2
Jul 27, 2010
Equipment storage for substrate processing apparatus
BROOKS AUTOMATION INC
0 citations
49
HALL DANIEL A
1 patent
US8182192B2
May 22, 2012
Equipment storage for substrate processing apparatus
HALL DANIEL A
1 citations
47