Inventor

WIDMANN MICHAEL

DE3 patents

⚠️ This page may combine multiple inventors who share the name “WIDMANN MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCHOEPPACH ARMIN

1 patent

US8705006B2Apr 22, 2014

Method and device for connecting an optical element to a frame

SCHOEPPACH ARMIN6 citations79

SIX STEPHAN

1 patent

US8279402B2Oct 2, 2012

Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same

SIX STEPHAN11 citations76

ZEISS CARL SMT GMBH

1 patent

US9604299B2Mar 28, 2017

Method and device for connecting an optical element to a frame

ZEISS CARL SMT GMBH2 citations68