P

Inventor

EKSTEIN CLAUDIA

DE5 patents
⚠️ This page may combine multiple inventors who share the name “EKSTEIN CLAUDIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

3 patents
US8976927B2Mar 10, 2015

Substrate for mirrors for EUV lithography

ZEISS CARL SMT GMBH6 citations71
US9604299B2Mar 28, 2017

Method and device for connecting an optical element to a frame

ZEISS CARL SMT GMBH2 citations68
US10935704B2Mar 2, 2021

Substrate for an EUV-lithography mirror

ZEISS CARL SMT GMBH1 citations57

ZEISS CARL SMT AG

1 patent
US7816022B2Oct 19, 2010

Composite structure for microlithography and optical arrangement

ZEISS CARL SMT AG21 citations91

SCHOEPPACH ARMIN

1 patent
US8705006B2Apr 22, 2014

Method and device for connecting an optical element to a frame

SCHOEPPACH ARMIN6 citations79