Inventor
ANGELO DARRYL
US5 patents
⚠️ This page may combine multiple inventors who share the name “ANGELO DARRYL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS6235163B1May 22, 2001
Methods and apparatus for ionized metal plasma copper deposition with enhanced in-film particle performance
APPLIED MATERIALS INC54 citations93
US6458251B1Oct 1, 2002
Pressure modulation method to obtain improved step coverage of seed layer
APPLIED MATERIALS INC28 citations89
US6607640B2Aug 19, 2003
Temperature control of a substrate
APPLIED MATERIALS INC13 citations83