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Inventor
ROH JUN-YONG
KR
2 patents
Patents
2 patents
US6670689B2
Dec 30, 2003
Semiconductor device having shallow trench isolation structure
SAMSUNG ELECTRONICS CO LTD
22 citations
89
US5545582A
Aug 13, 1996
Method for manufacturing semiconductor device capacitor
SAMSUNG ELECTRONICS CO LTD
23 citations
85