Inventor

CHEN TIEN-YA

TW3 patents

⚠️ This page may combine multiple inventors who share the name “CHEN TIEN-YA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNITED MICROELECTRONICS CORP

2 patents

US6289550B1Sep 18, 2001

Jet cleaning device for developing station

UNITED MICROELECTRONICS CORP8 citations65

US6286178B1Sep 11, 2001

Jet cleaning device for developing station

UNITED MICROELECTRONICS CORP2 citations54

UNITED SEMICONDUCTOR CORP

1 patent

US6097992AAug 1, 2000

Method and controlling system for preventing the scratching of wafer backs by the fetch arm of a stepper machine

UNITED SEMICONDUCTOR CORP1 citations42