Inventor
CLUBE FRANCIS S M
CH5 patents
⚠️ This page may combine multiple inventors who share the name “CLUBE FRANCIS S M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HOLTRONIC TECHNOLOGIES LTD
2 patentsUS5187372AFeb 16, 1993
Apparatus for and a method of transverse position measurement in proximity lithographic systems
HOLTRONIC TECHNOLOGIES LTD73 citations92
US5640257AJun 17, 1997
Apparatus and method for the manufacture of high uniformity total internal reflection holograms
HOLTRONIC TECHNOLOGIES LTD18 citations80