Inventor
MCCHESNEY JON
US32 patents
⚠️ This page may combine multiple inventors who share the name “MCCHESNEY JON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
25 patentsUS10410836B2Sep 10, 2019
Systems and methods for tuning to reduce reflected power in multiple states
LAM RES CORP30 citations94
US10124492B2Nov 13, 2018
Automated replacement of consumable parts using end effectors interfacing with plasma processing system
LAM RES CORP25 citations93
US10062599B2Aug 28, 2018
Automated replacement of consumable parts using interfacing chambers
LAM RES CORP30 citations93
US10658222B2May 19, 2020
Moveable edge coupling ring for edge process control during semiconductor wafer processing
LAM RES CORP7 citations82
US10541168B2Jan 21, 2020
Edge ring centering method using ring dynamic alignment data
LAM RES CORP9 citations82
US11605546B2Mar 14, 2023
Moveable edge coupling ring for edge process control during semiconductor wafer processing
LAM RES CORP2 citations73
US9885493B2Feb 6, 2018
Air cooled faraday shield and methods for using the same
LAM RES CORP4 citations73
US9530656B2Dec 27, 2016
Temperature control in RF chamber with heater and air amplifier
LAM RES CORP3 citations73
US11011353B2May 18, 2021
Systems and methods for performing edge ring characterization
LAM RES CORP3 citations72
US10957521B2Mar 23, 2021
Image based plasma sheath profile detection on plasma processing tools
LAM RES CORP6 citations72
US10427307B2Oct 1, 2019
Automated replacement of consumable parts using end effectors interfacing with plasma processing system
LAM RES CORP3 citations72
US10304717B2May 28, 2019
Automated replacement of consumable parts using interfacing chambers
LAM RES CORP2 citations72
US11887819B2Jan 30, 2024
Systems for cooling RF heated chamber components
LAM RES CORP0 citations62
US11692732B2Jul 4, 2023
Air cooled faraday shield and methods for using the same
LAM RES CORP0 citations62
US11495441B2Nov 8, 2022
Systems for cooling RF heated chamber components
LAM RES CORP0 citations62
US12027410B2Jul 2, 2024
Edge ring arrangement with moveable edge rings
LAM RES CORP0 citations61
US12237154B2Feb 25, 2025
Bottom and middle edge rings
LAM RES CORP0 citations53
US12183554B2Dec 31, 2024
Bottom and middle edge rings
LAM RES CORP1 citations53
US10825661B2Nov 3, 2020
Systems for cooling RF heated chamber components
LAM RES CORP0 citations52
US10690374B2Jun 23, 2020
Air cooled faraday shield and methods for using the same
LAM RES CORP0 citations52
US10651013B2May 12, 2020
Systems and methods for tuning to reduce reflected power in multiple states
LAM RES CORP0 citations52
US10600620B2Mar 24, 2020
Temperature control in RF chamber with heater and air amplifier
LAM RES CORP0 citations52
US10770339B2Sep 8, 2020
Automated replacement of consumable parts using interfacing chambers
LAM RES CORP0 citations51
US12230482B2Feb 18, 2025
Moveable edge ring designs
LAM RES CORP0 citations47
US10242844B2Mar 26, 2019
Rotating RF electric field antenna for uniform plasma generation
LAM RES CORP0 citations42