Inventor
PATERSON ALEXANDER MILLER
US19 patents
Patents
19 patentsUS10541168B2Jan 21, 2020
Edge ring centering method using ring dynamic alignment data
LAM RES CORP9 citations82
US10957521B2Mar 23, 2021
Image based plasma sheath profile detection on plasma processing tools
LAM RES CORP6 citations72
US10879044B2Dec 29, 2020
Auxiliary circuit in RF matching network for frequency tuning assisted dual-level pulsing
LAM RES CORP2 citations72
US12494345B2Dec 9, 2025
Pulsing RF coils of a plasma chamber in reverse synchronization
LAM RES CORP1 citations63
US12261029B2Mar 25, 2025
Protection system for switches in direct drive circuits of substrate processing systems
LAM RES CORP0 citations62
US12165841B2Dec 10, 2024
Dual-frequency, direct-drive inductively coupled plasma source
LAM RES CORP0 citations62
US12119232B2Oct 15, 2024
Etching isolation features and dense features within a substrate
LAM RES CORP0 citations62
US11887819B2Jan 30, 2024
Systems for cooling RF heated chamber components
LAM RES CORP0 citations62
US11728137B2Aug 15, 2023
Direct frequency tuning for matchless plasma source in substrate processing systems
LAM RES CORP1 citations62
US11495441B2Nov 8, 2022
Systems for cooling RF heated chamber components
LAM RES CORP0 citations62
US11398387B2Jul 26, 2022
Etching isolation features and dense features within a substrate
LAM RES CORP0 citations62
US11011351B2May 18, 2021
Monoenergetic ion generation for controlled etch
LAM RES CORP1 citations62
US12573589B2Mar 10, 2026
Synchronization of RF generators
LAM RES CORP0 citations60
US12322579B2Jun 3, 2025
Metal contamination reduction in substrate processing systems with transformer coupled plasma
LAM RES CORP0 citations60
US12046450B2Jul 23, 2024
Synchronization of RF generators
LAM RES CORP0 citations60
US11056321B2Jul 6, 2021
Metal contamination reduction in substrate processing systems with transformer coupled plasma
LAM RES CORP0 citations60
US10825661B2Nov 3, 2020
Systems for cooling RF heated chamber components
LAM RES CORP0 citations52
US12482634B2Nov 25, 2025
Symmetric coupling of coil to direct-drive radiofrequency power supplies
LAM RES CORP0 citations51
US12397435B2Aug 26, 2025
Substrate location detection and adjustment
LAM RES CORP0 citations51