Inventor
TOMPKINS ROBERT E
US16 patents
⚠️ This page may combine multiple inventors who share the name “TOMPKINS ROBERT E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
10 patentsUS5191506AMar 2, 1993
Ceramic electrostatic chuck
IBM144 citations98
US5155652AOct 13, 1992
Temperature cycling ceramic electrostatic chuck
IBM144 citations97
US5055964AOct 8, 1991
Electrostatic chuck having tapered electrodes
IBM120 citations97
US5561585AOct 1, 1996
Electrostatic chuck with reference electrode
IBM74 citations96
US5463525AOct 31, 1995
Guard ring electrostatic chuck
IBM101 citations96
US5535507AJul 16, 1996
Method of making electrostatic chuck with oxide insulator
IBM47 citations92
US5521790AMay 28, 1996
Electrostatic chuck having relatively thick and thin areas and means for uniformly cooling said thick and thin areas during chuck anodization
IBM53 citations92
US5467249ANov 14, 1995
Electrostatic chuck with reference electrode
IBM28 citations92
US5099571AMar 31, 1992
Method for fabricating a split-ring electrostatic chuck
IBM44 citations92
US5612851AMar 18, 1997
Guard ring electrostatic chuck
IBM15 citations82