Inventor
DECOSTER STEFAN
BE3 patents
Patents
3 patentsUS12451429B2Oct 21, 2025
Interconnection structure for a semiconductor device
IMEC VZW0 citations55
US11264271B2Mar 1, 2022
Semiconductor fabrication method for producing nano-scaled electrically conductive lines
IMEC VZW0 citations47
US12381116B2Aug 5, 2025
Method of manufacturing an interconnection structure for a semiconductor device having a spacer separating first and second conductive lines
IMEC VZW0 citations44