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Inventor
WARD MICHAEL L
US
2 patents
⚠️ This page may combine multiple inventors who share the name “WARD MICHAEL L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRION CORP
1 patent
US4874947A
Oct 17, 1989
Focused ion beam imaging and process control
MICRION CORP
105 citations
93
WARD MICHAEL L
1 patent
US4413436A
Nov 8, 1983
Aquarium with simulated stream flow
WARD MICHAEL L
12 citations
66