Inventor
TSENG MENG C
US4 patents
Patents
4 patentsUS5326725AJul 5, 1994
Clamping ring and susceptor therefor
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US5500249AMar 19, 1996
Uniform tungsten silicide films produced by chemical vapor deposition
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US5565382AOct 15, 1996
Process for forming tungsten silicide on semiconductor wafer using dichlorosilane gas
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US5558910ASep 24, 1996
Uniform tungsten silicide films produced by chemical vapor deposition
APPLIED MATERIALS INC24 citations91