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Inventor
LACHER MANFRED
DE
4 patents
⚠️ This page may combine multiple inventors who share the name “LACHER MANFRED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IMM INST FUR MIKROTECHNIK GMBH
1 patent
US5465611A
Nov 14, 1995
Sensor head for use in atomic force microscopy and method for its production
IMM INST FUR MIKROTECHNIK GMBH
83 citations
91
LEYBOLD VAKUUM GMBH
1 patent
US6277177B1
Aug 21, 2001
Gas passage with selectively acting penetration surface and process for producing the penetration surface
LEYBOLD VAKUUM GMBH
32 citations
90
HOECHST AG
1 patent
US5698485A
Dec 16, 1997
Process for producing ceramic microstructures from polymeric precursors
HOECHST AG
46 citations
89
INST MIKROTECHNIK MAINZ GMBH
1 patent
US7041433B1
May 9, 2006
Flat coil and lithographic method for producing microcomponents
INST MIKROTECHNIK MAINZ GMBH
5 citations
54