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Inventor
SEIFFERLY JEFFREY ALAN
US
2 patents
Patents
2 patents
US6159871A
Dec 12, 2000
Method for producing hydrogenated silicon oxycarbide films having low dielectric constant
DOW CORNING
365 citations
96
US6593655B1
Jul 15, 2003
Method for producing hydrogenated silicon oxycarbide films having low dielectric constant
DOW CORNING
81 citations
95