Inventor

CHANG LI-CHENG

TW3 patents

⚠️ This page may combine multiple inventors who share the name “CHANG LI-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

2 patents

US11316039B2Apr 26, 2022

Method for manufacturing semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations53

US10727328B2Jul 28, 2020

Semiconductor device and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations42

UNIV NAT TAIWAN

1 patent

US10115563B2Oct 30, 2018

Electron-beam lithography method and system

UNIV NAT TAIWAN0 citations30