Inventor
TSAI SHYUE-SHIN
TW3 patents
Patents
3 patentsUS11859284B2Jan 2, 2024
Shower head structure and plasma processing apparatus using the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations64
US12215422B2Feb 4, 2025
Shower head structure and plasma processing apparatus using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations54
US9970105B2May 15, 2018
Method for sealing processing module
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations36