Inventor

KISHIDA YOSHIFUMI

JP3 patents

Patents

3 patents

US4643774AFeb 17, 1987

Method of washing and drying substrates

SHARP KK45 citations93

US4714086ADec 22, 1987

Apparatus for washing and drying substrates

SHARP KK15 citations79

US5455182AOct 3, 1995

Semiconductor process for forming channel layer with passivated covering

SHARP KK11 citations67