Inventor

TSAI YOUNG-TONG

SG4 patents

⚠️ This page may combine multiple inventors who share the name “TSAI YOUNG-TONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US6559049B2May 6, 2003

All dual damascene oxide etch process steps in one confined plasma chamber

LAM RES CORP24 citations88

US6861362B2Mar 1, 2005

Self-aligned contact process implementing bias compensation etch endpoint detection and methods for implementing the same

LAM RES CORP7 citations70

CHARTERED SEMICONDUCTOR MFG

2 patents

US6057240AMay 2, 2000

Aqueous surfactant solution method for stripping metal plasma etch deposited oxidized metal impregnated polymer residue layers from patterned metal layers

CHARTERED SEMICONDUCTOR MFG18 citations82

US5792708AAug 11, 1998

Method for forming residue free patterned polysilicon layers upon high step height integrated circuit substrates

CHARTERED SEMICONDUCTOR MFG13 citations72