Inventor

HASHIDA SHIGERU

JP3 patents

Patents

3 patents

US5012169AApr 30, 1991

Motor drive system

YOKOGAWA ELECTRIC CORP63 citations93

US5742136AApr 21, 1998

Linear motor drive system

YOKOGAWA ELECTRIC CORP26 citations90

US6603562B1Aug 5, 2003

Two-dimensional positioning apparatus and method for measuring laser light from the apparatus

YOKOGAWA ELECTRIC CORP3 citations57