Inventor
STREUTKER GERRIT
NL2 patents
Patents
2 patentsUS7924406B2Apr 12, 2011
Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels
ASML NETHERLANDS BV3 citations60
US7671968B2Mar 2, 2010
Lithographic apparatus having masking parts and device manufacturing method
ASML NETHERLANDS BV1 citations50