Inventor

CHEN JUNPENG

CN2 patents

Patents

2 patents

US11309209B2Apr 19, 2022

Wafer holder and wafer transfer apparatus, system and method

SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD1 citations58

US11326685B2May 10, 2022

Linear module and operating method thereof

SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD0 citations46