Inventor
HAYES GREGORY L
US4 patents
Patents
4 patentsUS5497316AMar 5, 1996
Process gas distribution system and method
SCI SYSTEMS INC109 citations97
US5220517AJun 15, 1993
Process gas distribution system and method with supervisory control
SCI SYSTEMS INC89 citations95
US5657254AAug 12, 1997
Process gas distribution system and method with automatic transducer zero calibration
SCI SYSTEMS INC83 citations94
US5508947AApr 16, 1996
Process gas distribution system and method with automatic transducer zero calibration
SCI SYSTEMS INC83 citations94