Inventor

DELAROSA MARK J

US2 patents

Patents

2 patents

US6527855B2Mar 4, 2003

Atomic layer deposition of cobalt from cobalt metallorganic compounds

RENSSELAER POLYTECH INST87 citations95

US6818990B2Nov 16, 2004

Fluorine diffusion barriers for fluorinated dielectrics in integrated circuits

RENSSELAER POLYTECH INST4 citations60