Inventor
GLASS MIRKO
DE2 patents
Patents
2 patentsUS8058170B2Nov 15, 2011
Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics
CHANDRASHEKAR ANAND83 citations95
US8409987B2Apr 2, 2013
Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics
CHANDRASHEKAR ANAND34 citations91