Inventor
KAMADA TOYOHIRO
US5 patents
Patents
5 patentsUS9478410B2Oct 25, 2016
Method of forming nitride film with plasma
TOKYO ELECTRON LTD13 citations81
US11201053B2Dec 14, 2021
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations60
US10714332B2Jul 14, 2020
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations60
US11417514B2Aug 16, 2022
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations59
US9922820B2Mar 20, 2018
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations50