Inventor
AZUMO SHUJI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “AZUMO SHUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
15 patentsUS8999102B2Apr 7, 2015
Substrate processing apparatus
TOKYO ELECTRON LTD463 citations98
US12152304B2Nov 26, 2024
Film forming method for forming self-assembled monolayer on substrate
TOKYO ELECTRON LTD2 citations72
US11788185B2Oct 17, 2023
Film formation method and film formation device
TOKYO ELECTRON LTD2 citations72
US10790138B2Sep 29, 2020
Method and system for selectively forming film
TOKYO ELECTRON LTD2 citations72
US9293543B2Mar 22, 2016
Film forming method and film forming apparatus
TOKYO ELECTRON LTD5 citations72
US12456620B2Oct 28, 2025
Film-forming method
TOKYO ELECTRON LTD0 citations62
US12183572B2Dec 31, 2024
Film formation method and film formation device
TOKYO ELECTRON LTD0 citations62
US11830741B2Nov 28, 2023
Method for forming film
TOKYO ELECTRON LTD0 citations62
US11417514B2Aug 16, 2022
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations59
US11041239B2Jun 22, 2021
Film forming method for SiC film
TOKYO ELECTRON LTD0 citations59
US12540394B2Feb 3, 2026
Selective film formation using self-assembled monolayer
TOKYO ELECTRON LTD0 citations52
US12341004B2Jun 24, 2025
Film formation method and film formation apparatus
TOKYO ELECTRON LTD0 citations51
US11598001B2Mar 7, 2023
Film forming method
TOKYO ELECTRON LTD0 citations51
US12387926B2Aug 12, 2025
Selective film formation using self-assembled monolayer
TOKYO ELECTRON LTD0 citations48
US10490443B2Nov 26, 2019
Selective film forming method and method of manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations40