Inventor
GALTRY MICHAEL ANDREW
GB7 patents
⚠️ This page may combine multiple inventors who share the name “GALTRY MICHAEL ANDREW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EDWARDS LTD
6 patentsUS11187222B2Nov 30, 2021
Vacuum pumping arrangement
EDWARDS LTD3 citations69
US11971041B2Apr 30, 2024
Drag pump
EDWARDS LTD0 citations57
US7638106B2Dec 29, 2009
Method of treating a gas stream
EDWARDS LTD2 citations57
US7914265B2Mar 29, 2011
Evacuation of a load lock enclosure
EDWARDS LTD3 citations54
US12288696B2Apr 29, 2025
Modular foreline system
EDWARDS LTD0 citations48
US11933284B2Mar 19, 2024
Multiple chamber vacuum exhaust system
EDWARDS LTD0 citations45