Inventor
RAMACHANDRARAO VIJAYAKUMAR
US4 patents
Patents
4 patentsUS7303648B2Dec 4, 2007
Via etch process
INTEL CORP2 citations60
US7214605B2May 8, 2007
Deposition of diffusion barrier
INTEL CORP6 citations60
US7049053B2May 23, 2006
Supercritical carbon dioxide to reduce line edge roughness
INTEL CORP3 citations52
US7422020B2Sep 9, 2008
Aluminum incorporation in porous dielectric for improved mechanical properties of patterned dielectric
INTEL CORP1 citations49