Inventor
KIMURA YOSHIO
JP96 patents
⚠️ This page may combine multiple inventors who share the name “KIMURA YOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
31 patentsUS5826129AOct 20, 1998
Substrate processing system
TOKYO ELECTRON LTD552 citations99
US5061144AOct 29, 1991
Resist process apparatus
TOKYO ELECTRON LTD183 citations99
US6439822B1Aug 27, 2002
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD540 citations98
US6033475AMar 7, 2000
Resist processing apparatus
TOKYO ELECTRON LTD90 citations97
US6444029B1Sep 3, 2002
Multistage spin type substrate processing system
TOKYO ELECTRON LTD57 citations96
US5374312ADec 20, 1994
Liquid coating system
TOKYO ELECTRON LTD119 citations96
US5089305AFeb 18, 1992
Coating apparatus and method for applying a liquid to a semiconductor wafer including selecting a nozzle on a stand by state
TOKYO ELECTRON LTD74 citations96
US5002008AMar 26, 1991
Coating apparatus and method for applying a liquid to a semiconductor wafer, including selecting a nozzle in a stand-by state
TOKYO ELECTRON LTD115 citations96
US5711809AJan 27, 1998
Coating apparatus and method of controlling the same
TOKYO ELECTRON LTD55 citations95
US7281869B2Oct 16, 2007
Coating and developing system and coating and developing method
TOKYO ELECTRON LTD30 citations93
US7267497B2Sep 11, 2007
Coating and developing system and coating and developing method
TOKYO ELECTRON LTD29 citations93
US7241061B2Jul 10, 2007
Coating and developing system and coating and developing method
TOKYO ELECTRON LTD34 citations93
US6427717B1Aug 6, 2002
Process solution supplying apparatus and fluid passageway opening-closing valve device for process solution supplying apparatus
TOKYO ELECTRON LTD47 citations93
US6183147B1Feb 6, 2001
Process solution supply system, substrate processing apparatus employing the system, and intermediate storage mechanism employed in the system
TOKYO ELECTRON LTD33 citations93
US6161969ADec 19, 2000
Apparatus for processing a substrate
TOKYO ELECTRON LTD44 citations93
US5578127ANov 26, 1996
System for applying process liquid
TOKYO ELECTRON LTD46 citations93
US5275658AJan 4, 1994
Liquid supply apparatus
TOKYO ELECTRON LTD44 citations93
US7797855B2Sep 21, 2010
Heating apparatus, and coating and developing apparatus
TOKYO ELECTRON LTD30 citations92
US7780366B2Aug 24, 2010
Resist pattern forming method
TOKYO ELECTRON LTD22 citations92
US7488127B2Feb 10, 2009
Resist pattern forming apparatus and method thereof
TOKYO ELECTRON LTD16 citations92
US6984477B2Jan 10, 2006
Resist pattern forming apparatus and method thereof
TOKYO ELECTRON LTD25 citations92
US6015066AJan 18, 2000
Liquid supplying device
TOKYO ELECTRON LTD44 citations92
US6368776B1Apr 9, 2002
Treatment apparatus and treatment method
TOKYO ELECTRON LTD36 citations91
US5908657AJun 1, 1999
Coating apparatus and method of controlling the same
TOKYO ELECTRON LTD34 citations91
US6593045B2Jul 15, 2003
Substrate processing apparatus and method
TOKYO ELECTRON LTD38 citations90
US5733375AMar 31, 1998
Apparatus for supplying a treatment material
TOKYO ELECTRON LTD30 citations90
US7245348B2Jul 17, 2007
Coating and developing system and coating and developing method with antireflection film and an auxiliary block for inspection and cleaning
TOKYO ELECTRON LTD18 citations84
US6746197B2Jun 8, 2004
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD14 citations84
US6713239B2Mar 30, 2004
Developing method and developing apparatus
TOKYO ELECTRON LTD14 citations84
US6579370B2Jun 17, 2003
Apparatus and method for coating treatment
TOKYO ELECTRON LTD17 citations83
US6398429B1Jun 4, 2002
Developing method and developing apparatus
TOKYO ELECTRON LTD12 citations74
CANON KK
6 patentsUS7619765B2Nov 17, 2009
Client server system, information processing apparatus and control method therefor, and program for executing the control method
CANON KK20 citations93
US6447184B2Sep 10, 2002
Method and apparatus for controlling a printing operation
CANON KK46 citations93
US7684064B2Mar 23, 2010
Print job authentication
CANON KK43 citations92
US7127451B1Oct 24, 2006
Device searching method, device searching client, device, device searching server, device searching system, device searching apparatus, and storage medium
CANON KK19 citations84
US7154616B2Dec 26, 2006
Application charging system, information processing apparatus, and control method therefor and memory medium storing program therefor
CANON KK17 citations80
US6885474B2Apr 26, 2005
Image processing apparatus and method and memory medium
CANON KK8 citations74
TOYOTA MOTOR CO LTD
2 patentsUS5964309AOct 12, 1999
Power supply system, electric vehicle with power supply system mounted thereon, and method of regulating amount of fuel supply
TOYOTA MOTOR CO LTD168 citations98
US5929594AJul 27, 1999
Fuel-cells system, electric vehicle with fuel-cells system, and method of controlling supply of electric power
TOYOTA MOTOR CO LTD116 citations94
NHK SPRING CO LTD
2 patentsSANDEN CORP
2 patentsLUCKY CORP CO LTD
2 patentsKAO CORP
1 patentMATSUOKA NOBUAKI
1 patentAKIMOTO MASAMI
1 patentTETRA PAK INT
1 patentKOBE STEEL LTD
1 patentShowing the top 50 of 96 patents by PatentIndex Score.