P

Inventor

KIMURA YOSHIO

JP96 patents
⚠️ This page may combine multiple inventors who share the name “KIMURA YOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

31 patents
US5826129AOct 20, 1998

Substrate processing system

TOKYO ELECTRON LTD552 citations99
US5061144AOct 29, 1991

Resist process apparatus

TOKYO ELECTRON LTD183 citations99
US6439822B1Aug 27, 2002

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD540 citations98
US6033475AMar 7, 2000

Resist processing apparatus

TOKYO ELECTRON LTD90 citations97
US6444029B1Sep 3, 2002

Multistage spin type substrate processing system

TOKYO ELECTRON LTD57 citations96
US5374312ADec 20, 1994

Liquid coating system

TOKYO ELECTRON LTD119 citations96
US5089305AFeb 18, 1992

Coating apparatus and method for applying a liquid to a semiconductor wafer including selecting a nozzle on a stand by state

TOKYO ELECTRON LTD74 citations96
US5002008AMar 26, 1991

Coating apparatus and method for applying a liquid to a semiconductor wafer, including selecting a nozzle in a stand-by state

TOKYO ELECTRON LTD115 citations96
US5711809AJan 27, 1998

Coating apparatus and method of controlling the same

TOKYO ELECTRON LTD55 citations95
US7281869B2Oct 16, 2007

Coating and developing system and coating and developing method

TOKYO ELECTRON LTD30 citations93
US7267497B2Sep 11, 2007

Coating and developing system and coating and developing method

TOKYO ELECTRON LTD29 citations93
US7241061B2Jul 10, 2007

Coating and developing system and coating and developing method

TOKYO ELECTRON LTD34 citations93
US6427717B1Aug 6, 2002

Process solution supplying apparatus and fluid passageway opening-closing valve device for process solution supplying apparatus

TOKYO ELECTRON LTD47 citations93
US6183147B1Feb 6, 2001

Process solution supply system, substrate processing apparatus employing the system, and intermediate storage mechanism employed in the system

TOKYO ELECTRON LTD33 citations93
US6161969ADec 19, 2000

Apparatus for processing a substrate

TOKYO ELECTRON LTD44 citations93
US5578127ANov 26, 1996

System for applying process liquid

TOKYO ELECTRON LTD46 citations93
US5275658AJan 4, 1994

Liquid supply apparatus

TOKYO ELECTRON LTD44 citations93
US7797855B2Sep 21, 2010

Heating apparatus, and coating and developing apparatus

TOKYO ELECTRON LTD30 citations92
US7780366B2Aug 24, 2010

Resist pattern forming method

TOKYO ELECTRON LTD22 citations92
US7488127B2Feb 10, 2009

Resist pattern forming apparatus and method thereof

TOKYO ELECTRON LTD16 citations92
US6984477B2Jan 10, 2006

Resist pattern forming apparatus and method thereof

TOKYO ELECTRON LTD25 citations92
US6015066AJan 18, 2000

Liquid supplying device

TOKYO ELECTRON LTD44 citations92
US6368776B1Apr 9, 2002

Treatment apparatus and treatment method

TOKYO ELECTRON LTD36 citations91
US5908657AJun 1, 1999

Coating apparatus and method of controlling the same

TOKYO ELECTRON LTD34 citations91
US6593045B2Jul 15, 2003

Substrate processing apparatus and method

TOKYO ELECTRON LTD38 citations90
US5733375AMar 31, 1998

Apparatus for supplying a treatment material

TOKYO ELECTRON LTD30 citations90
US7245348B2Jul 17, 2007

Coating and developing system and coating and developing method with antireflection film and an auxiliary block for inspection and cleaning

TOKYO ELECTRON LTD18 citations84
US6746197B2Jun 8, 2004

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD14 citations84
US6713239B2Mar 30, 2004

Developing method and developing apparatus

TOKYO ELECTRON LTD14 citations84
US6579370B2Jun 17, 2003

Apparatus and method for coating treatment

TOKYO ELECTRON LTD17 citations83
US6398429B1Jun 4, 2002

Developing method and developing apparatus

TOKYO ELECTRON LTD12 citations74

CANON KK

6 patents

TOYOTA MOTOR CO LTD

2 patents

NHK SPRING CO LTD

2 patents

SANDEN CORP

2 patents

LUCKY CORP CO LTD

2 patents

KAO CORP

1 patent

MATSUOKA NOBUAKI

1 patent

AKIMOTO MASAMI

1 patent

TETRA PAK INT

1 patent

KOBE STEEL LTD

1 patent

Showing the top 50 of 96 patents by PatentIndex Score.