P

Inventor

TACHIBANA KOUZOU

JP16 patents
⚠️ This page may combine multiple inventors who share the name “TACHIBANA KOUZOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

11 patents
US9687873B2Jun 27, 2017

Coating film forming apparatus having ring-shaped baffle member movable between processing position and retreated position

TOKYO ELECTRON LTD10 citations83
US9070731B2Jun 30, 2015

Coating film forming apparatus, coating film forming method, and storage medium

TOKYO ELECTRON LTD11 citations83
US9217922B2Dec 22, 2015

Liquid processing apparatus, liquid processing method and storage medium for liquid processing

TOKYO ELECTRON LTD5 citations73
US10734255B2Aug 4, 2020

Substrate cleaning method, substrate cleaning system and memory medium

TOKYO ELECTRON LTD6 citations72
US11217451B2Jan 4, 2022

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD2 citations71
US10770284B2Sep 8, 2020

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD2 citations70
US12387939B2Aug 12, 2025

Substrate processing method

TOKYO ELECTRON LTD0 citations51
US11600500B2Mar 7, 2023

Substrate processing method

TOKYO ELECTRON LTD0 citations51
US12463064B2Nov 4, 2025

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD0 citations47
US9865452B2Jan 9, 2018

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD0 citations46
US10867814B2Dec 15, 2020

Liquid processing method, substrate processing apparatus, and storage medium

TOKYO ELECTRON LTD0 citations39

DAICEL CHEM

3 patents
US5089642AFeb 18, 1992

Optically active carboalkylated amino alcohols and their utilization in optical resolution

DAICEL CHEM4 citations61
US5041573AAug 20, 1991

Optically active carboalkylated amino alcohols and their utilization in optical resolution

DAICEL CHEM2 citations61
US4966985AOct 30, 1990

Optically active carboalkylated amino alcohols and their utilization in optical resolution

DAICEL CHEM2 citations61

AGENCY IND SCIENCE TECHN

1 patent
US4942149AJul 17, 1990

Crown ether compound and separating agent

AGENCY IND SCIENCE TECHN19 citations70

TACHIBANA KOUZOU

1 patent
US8871301B2Oct 28, 2014

Coating treatment apparatus, coating treatment method, and non-transitory computer storage medium

TACHIBANA KOUZOU3 citations55