P

Inventor

MORIKAWA KATSUHIRO

JP40 patents
⚠️ This page may combine multiple inventors who share the name “MORIKAWA KATSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

22 patents
US11208725B2Dec 28, 2021

Substrate processing apparatus

TOKYO ELECTRON LTD10 citations85
US10042356B2Aug 7, 2018

Substrate processing apparatus, method for correcting positional displacement, and storage medium

TOKYO ELECTRON LTD7 citations84
US7563042B2Jul 21, 2009

Substrate carrying apparatus, substrate carrying method, and coating and developing apparatus

TOKYO ELECTRON LTD16 citations83
US11637035B2Apr 25, 2023

Substrate processing apparatus with moving device for connecting and disconnecting heater electrodes and substrate processing method thereof

TOKYO ELECTRON LTD3 citations73
US11551945B2Jan 10, 2023

Substrate processing apparatus including periphery cover body

TOKYO ELECTRON LTD2 citations73
US11532492B2Dec 20, 2022

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD5 citations73
US9373531B2Jun 21, 2016

Substrate transfer device, substrate processing apparatus, and substrate accommodation method

TOKYO ELECTRON LTD3 citations73
US9696262B2Jul 4, 2017

Substrate processing apparatus, method of operating substrate processing apparatus, and storage medium

TOKYO ELECTRON LTD3 citations71
US10460976B2Oct 29, 2019

Substrate transfer device and substrate transfer method

TOKYO ELECTRON LTD5 citations68
US9627238B2Apr 18, 2017

Substrate transfer apparatus, substrate transfer method, and storage medium

TOKYO ELECTRON LTD4 citations68
US7987019B2Jul 26, 2011

Substrate transfer method and substrate transfer apparatus

TOKYO ELECTRON LTD3 citations63
US11097907B2Aug 24, 2021

Substrate transfer device and substrate transfer method

TOKYO ELECTRON LTD0 citations62
US11510284B2Nov 22, 2022

Substrate processing apparatus

TOKYO ELECTRON LTD1 citations60
US11244849B2Feb 8, 2022

Substrate transfer device and substrate transfer method

TOKYO ELECTRON LTD0 citations58
US12276027B2Apr 15, 2025

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD0 citations52
US11515182B2Nov 29, 2022

Drying apparatus, substrate processing system, and drying method

TOKYO ELECTRON LTD0 citations52
US9666463B2May 30, 2017

Substrate processing apparatus

TOKYO ELECTRON LTD1 citations52
US12109580B2Oct 8, 2024

Processing liquid nozzle and cleaning apparatus

TOKYO ELECTRON LTD0 citations51
US11600500B2Mar 7, 2023

Substrate processing method

TOKYO ELECTRON LTD0 citations51
US10128138B2Nov 13, 2018

Substrate transfer method and storage medium

TOKYO ELECTRON LTD0 citations48
US12463064B2Nov 4, 2025

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD0 citations47
US9773690B2Sep 26, 2017

Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport container

TOKYO ELECTRON LTD0 citations40

DENSO CORP

15 patents

NAKANO SEIJI

1 patent

NAKAHARADA MASAHIRO

1 patent

MORIKAWA KATSUHIRO

1 patent