Inventor
MORIKAWA KATSUHIRO
JP40 patents
⚠️ This page may combine multiple inventors who share the name “MORIKAWA KATSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
22 patentsUS11208725B2Dec 28, 2021
Substrate processing apparatus
TOKYO ELECTRON LTD10 citations85
US10042356B2Aug 7, 2018
Substrate processing apparatus, method for correcting positional displacement, and storage medium
TOKYO ELECTRON LTD7 citations84
US7563042B2Jul 21, 2009
Substrate carrying apparatus, substrate carrying method, and coating and developing apparatus
TOKYO ELECTRON LTD16 citations83
US11637035B2Apr 25, 2023
Substrate processing apparatus with moving device for connecting and disconnecting heater electrodes and substrate processing method thereof
TOKYO ELECTRON LTD3 citations73
US11551945B2Jan 10, 2023
Substrate processing apparatus including periphery cover body
TOKYO ELECTRON LTD2 citations73
US11532492B2Dec 20, 2022
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD5 citations73
US9373531B2Jun 21, 2016
Substrate transfer device, substrate processing apparatus, and substrate accommodation method
TOKYO ELECTRON LTD3 citations73
US9696262B2Jul 4, 2017
Substrate processing apparatus, method of operating substrate processing apparatus, and storage medium
TOKYO ELECTRON LTD3 citations71
US10460976B2Oct 29, 2019
Substrate transfer device and substrate transfer method
TOKYO ELECTRON LTD5 citations68
US9627238B2Apr 18, 2017
Substrate transfer apparatus, substrate transfer method, and storage medium
TOKYO ELECTRON LTD4 citations68
US7987019B2Jul 26, 2011
Substrate transfer method and substrate transfer apparatus
TOKYO ELECTRON LTD3 citations63
US11097907B2Aug 24, 2021
Substrate transfer device and substrate transfer method
TOKYO ELECTRON LTD0 citations62
US11510284B2Nov 22, 2022
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations60
US11244849B2Feb 8, 2022
Substrate transfer device and substrate transfer method
TOKYO ELECTRON LTD0 citations58
US12276027B2Apr 15, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations52
US11515182B2Nov 29, 2022
Drying apparatus, substrate processing system, and drying method
TOKYO ELECTRON LTD0 citations52
US9666463B2May 30, 2017
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations52
US12109580B2Oct 8, 2024
Processing liquid nozzle and cleaning apparatus
TOKYO ELECTRON LTD0 citations51
US11600500B2Mar 7, 2023
Substrate processing method
TOKYO ELECTRON LTD0 citations51
US10128138B2Nov 13, 2018
Substrate transfer method and storage medium
TOKYO ELECTRON LTD0 citations48
US12463064B2Nov 4, 2025
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations47
US9773690B2Sep 26, 2017
Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport container
TOKYO ELECTRON LTD0 citations40
DENSO CORP
15 patentsUS6147637ANov 14, 2000
Obstacle detecting system for automotive vehicle
DENSO CORP94 citations98
US6710859B2Mar 23, 2004
Distance measurement apparatus
DENSO CORP85 citations97
US6757054B2Jun 29, 2004
Time measurement apparatus, distance measurement apparatus, and clock signal generating apparatus usable therein
DENSO CORP20 citations93
US6657704B2Dec 2, 2003
Distance measurement apparatus
DENSO CORP21 citations93
US6567039B2May 20, 2003
Road-shape recognition system
DENSO CORP20 citations93
US6484087B2Nov 19, 2002
Method of selecting a preceding vehicle, a preceding vehicle selecting apparatus, and a recording medium for selecting a preceding vehicle
DENSO CORP34 citations93
US6466863B2Oct 15, 2002
Traveling-path estimation apparatus for vehicle
DENSO CORP49 citations93
US7602477B2Oct 13, 2009
Radar device
DENSO CORP12 citations84
US7158217B2Jan 2, 2007
Vehicle radar device
DENSO CORP18 citations84
US6553283B2Apr 22, 2003
Method and apparatus for recognizing shape of road
DENSO CORP15 citations84
US6553282B2Apr 22, 2003
Method and apparatus for recognizing shape of road
DENSO CORP10 citations74
US6380885B2Apr 30, 2002
Obstacle recognition system for vehicle
DENSO CORP12 citations74
US6665056B2Dec 16, 2003
Method and apparatus for measuring distance to a detection object
DENSO CORP5 citations63
US6628374B2Sep 30, 2003
Distance measurement apparatus
DENSO CORP4 citations63
US7528766B2May 5, 2009
Radar device for transmitting radio signal over angular scanning field
DENSO CORP1 citations52