Inventor
MIZUNAGA KOUICHI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “MIZUNAGA KOUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS11208725B2Dec 28, 2021
Substrate processing apparatus
TOKYO ELECTRON LTD10 citations85
US11637035B2Apr 25, 2023
Substrate processing apparatus with moving device for connecting and disconnecting heater electrodes and substrate processing method thereof
TOKYO ELECTRON LTD3 citations73
US11551945B2Jan 10, 2023
Substrate processing apparatus including periphery cover body
TOKYO ELECTRON LTD2 citations73
US11868056B2Jan 9, 2024
Substrate processing apparatus
TOKYO ELECTRON LTD2 citations71
US8375884B2Feb 19, 2013
Substrate processing apparatus
TOKYO ELECTRON LTD5 citations71
US10964564B2Mar 30, 2021
Heating treatment apparatus and heating treatment method
TOKYO ELECTRON LTD2 citations68
US12204256B2Jan 21, 2025
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US11510284B2Nov 22, 2022
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations60
US11842906B2Dec 12, 2023
Heating treatment apparatus and heating treatment method
TOKYO ELECTRON LTD0 citations58
US11600500B2Mar 7, 2023
Substrate processing method
TOKYO ELECTRON LTD0 citations51
US12463064B2Nov 4, 2025
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations47