Inventor
LUAN XINNING
US8 patents
⚠️ This page may combine multiple inventors who share the name “LUAN XINNING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS12243761B2Mar 4, 2025
Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging
APPLIED MATERIALS INC0 citations61
US12180611B2Dec 31, 2024
Methods of forming silicon carbide coated base substrates at multiple temperatures
APPLIED MATERIALS INC0 citations59
US11827999B2Nov 28, 2023
Methods of forming silicon carbide coated base substrates at multiple temperatures
APPLIED MATERIALS INC0 citations59
US12512362B2Dec 30, 2025
Susceptor improvement
APPLIED MATERIALS INC0 citations47
US12584240B2Mar 24, 2026
Low mass substrate support
APPLIED MATERIALS INC0 citations46
US12497697B2Dec 16, 2025
Layer with discrete islands formed on a substrate support
APPLIED MATERIALS INC0 citations45
US12534798B2Jan 27, 2026
Method of coating a chamber component
APPLIED MATERIALS INC0 citations41