Inventor
ROBINSON FREDERICK J L
GB3 patents
Patents
3 patentsUS5389793AFeb 14, 1995
Apparatus and methods for ion implantation
APPLIED MATERIALS INC90 citations94
US4733091AMar 22, 1988
Systems and methods for ion implantation of semiconductor wafers
APPLIED MATERIALS INC109 citations94
US4776744AOct 11, 1988
Systems and methods for wafer handling in semiconductor process equipment
APPLIED MATERIALS INC410 citations93